Luginbuhl, Ph.Indermühle, P.-F.Grétillat, M.-A.Willemein, F.de Rooij, N. F.Gerber, D.Gervasio, G.Vuilleumier, J.-L.Twerenbold, D.Duggelin, M.Guggenheim, R.2009-05-122009-05-122009-05-121999https://infoscience.epfl.ch/handle/20.500.14299/39567Micromachined injector for mass spectrometrytext::conference output::conference proceedings::conference paper