Dorier, J.-L.Guittienne, Ph.Hollenstein, Ch.Gindrat, M.Refke, A.2010-05-192010-05-192010-05-19200910.1016/j.surfcoat.2008.10.034https://infoscience.epfl.ch/handle/20.500.14299/50174WOS:000265391800008Plasma spraying is a well developed and widely used technology, successfully applied for ceramic and metal coatings in many fields of applications such as aeronautics, gas turbine, automotive or medical. The coatings obtained are usually intentionally porous and thick (more than 100 pm). Presently, thin films (<mu m) are deposited using various physical vapour deposition (PVD) or chemical vapour deposition (CVD) processes with low deposition rates. In this paper, we make use of the high enthalpy and high ionisation degree of the plasma jet of conventional plasma spraying guns operated at low pressure (mbar) to obtain dense coatings by CVD from gaseous and/or liquid precursors. The advantages of such thermal plasma CVD processes are the high deposition rates to obtain dense and thin layers, and the possibility of combining these thin films with thermally sprayed coatings using the same equipment.Plasma sprayingChemical vapour depositionOptical emission spectroscopy (OES)Liquid injectionMass spectrometryThin filmIonstext::conference output::conference proceedings::conference paper