3D Micropatterning of Glass with Spark Assisted Chemical Engraving

Fujisaki, KFascio, ValiaWüthrich, RolfViquerat, DidierBleuler, Hannes2006-06-092006-06-092006-06-092003https://infoscience.epfl.ch/handle/20.500.14299/230396SACEglass micro-machiningmicroengineeringrobotics[SACE]3D Micropatterning of Glass with Spark Assisted Chemical Engravingtext::conference output::conference paper not in proceedings