Jutzi, F.Noell, W.de Rooij, N. F.2012-05-112012-05-112012-05-11201210.1117/12.906631https://infoscience.epfl.ch/handle/20.500.14299/80265WOS:000302688500015A novel technology is presented for arrays of vertical flaps as optically modulating elements which are actuated electrostatically to horizontal position at low voltages of 30-50V. One application is a reflective display exhibiting a contrast ratio of 1:95. We will also show a) shutters for transmissive devices in an array configuration and b) switchable gratings. A large variety of flap geometries are fabricated such as flat reflective, grating, lens or grid shape. Poly-Si refill of thin high aspect-ratio trenches followed of dry etching of the surrounding material is used to fabricate the flaps suspended by torsion beams.optical modulatorreflective displaymicromirrorlarge tilt anglelow actuation voltageswitchable gratingshutter arrayInktext::conference output::conference proceedings::conference paper