Tunable MEMS-based Optical Linear(1D)Diffusers for Dynamic Laser Beam Shaping and Homogenizing

Masson, J.Bich, A.Noell, W.Voelkel, R.Weible, K.J.de Rooij, N.F.2010-02-112010-02-112010-02-11200910.1109/OMEMS.2009.5338551https://infoscience.epfl.ch/handle/20.500.14299/46620Tunable MEMS-based Optical Linear(1D)Diffusers for Dynamic Laser Beam Shaping and Homogenizingtext::conference output::conference proceedings::conference paper