Weber, Stefan M.Bonacina, LuigiNoell, WilfriedKiselev, DenisExtermann, JeromeJutzi, FabioLani, SebastienNenadl, OndrejWolf, Jean-Pierrede Rooij, Nico F.2011-12-162011-12-162011-12-16201110.1063/1.3606440https://infoscience.epfl.ch/handle/20.500.14299/73598WOS:000293498400062We present an in-detail description of the design, simulation, fabrication, and packaging of a linear micromirror array specifically designed for temporal pulse shaping of ultrashort laser pulses. The innovative features of this device include a novel comb-drive actuator allowing both piston and tilt motion for phase- and amplitude-shaping, and an X-shaped laterally reinforced spring preventing lateral snap-in while providing high flexibility for both degrees of freedom. (C) 2011 American Institute of Physics. [doi:10.1063/1.3606440]laser mirrorsmicroactuatorsmicromirrorsmicro-optomechanical devicesoptical arraysoptical pulse shapingpackagingProgrammable Dispersive FilterUltraviolet PulsesMicromirror Arraytext::journal::journal article::research article