Overstolz, T.Niederer, G.Noell, W.Gale, M. T.Herzig, H. P.Obi, S.Thiele, H.de Rooij, N. F.2009-05-122009-05-122009-05-12200410.1117/12.545581https://infoscience.epfl.ch/handle/20.500.14299/39657MEMS tunable filter for telecom applicationstext::conference output::conference proceedings::conference paper