Meier, J.Kroll, U.Spitznagel, J.Benagli, S.Roschek, T.Pfanner, G.Ellert, C.Androutsopoulos, G.Hügli, A.Buechel, G.Buechel, A.Nagel, M.Feitknecht, L.Bucher, C.2009-02-102009-02-10200510.1109/PVSC.2005.1488418https://infoscience.epfl.ch/handle/20.500.14299/35105Progress in Up-Scaling of Thin Film Silicon Solar Cells by Large-Area PECVD KAI Systemstext::conference output::conference proceedings::conference paper