Kanno, IsakuOuyang, JunAkedo, JunYoshimura, TakeshiMalic, BarbaraMuralt, Paul2023-03-272023-03-272023-03-272023-02-2710.1063/5.0146681https://infoscience.epfl.ch/handle/20.500.14299/196553WOS:000942060100003Physics, AppliedPhysicsperformancePiezoelectric thin films for MEMStext::journal::journal article::research article