De Pastina, AMaillard, DVillanueva, LG2018-11-082018-11-082018-11-08201810.1016/j.mee.2018.02.011https://infoscience.epfl.ch/handle/20.500.14299/150269WOS:000428828500014Fabrication of suspended microchannel resonators with integrated piezoelectric transductiontext::journal::journal article::research article