Bich, A.Weible, K. J.Voelkel, R.Zimmermann, M.Harder, I.Lindlein, N.Masson, J.Bitterli, R.Noell, W.Scharf, T.2010-02-112010-02-112010-02-11200910.1117/12.828435https://infoscience.epfl.ch/handle/20.500.14299/46622Dynamic array spot shaping for laser micro machiningtext::conference output::conference proceedings::conference paper