Active and self-detecting cantilever with on-chip CMOS electronics for scanning force microscopy

Akiyama, T.Lange, D.Hagleitner, C.Tonin, A.Brand, O.Baltes, H.Staufer, U.de Rooij, N. F.2009-05-122009-05-122009-05-121999https://infoscience.epfl.ch/handle/20.500.14299/38919Active and self-detecting cantilever with on-chip CMOS electronics for scanning force microscopytext::conference output::conference proceedings::conference paper