Boero, GiovanniBrugger, JürgenYU, Henry S.C.Conde Rubio, Ana2021-11-192021-11-192021-11-192021-09-20https://infoscience.epfl.ch/handle/20.500.14299/183051We show a scalable process to fabricate reusable silicon templates with funnel- and cone-shaped traps for the capillary-assisted particle assembly (CAPA) technique. The assembly yield of 100 nm AuNPs in funnel traps is as high as 94% and the median of the particle position offset is 10 nm. Assembled AuNPs are then transferred from the silicon template onto other substrates such as PDMS or OrmoComp with a transfer rate > 99%. After the first transfer process, the silicon template is reused leading to a particle position offset comparable to that of the first assembly.reusable templatecapillary-assisted particle assemblyCAPAprecise placementfunnel assembly traptext::conference output::conference poster not in proceedings