Kettunen, V.Simonen, J.Ripoll, O.Kuittinen, M.Herzig, H. P.2009-04-222009-04-222009-04-22200210.1364/DOMO.2002.DMD3https://infoscience.epfl.ch/handle/20.500.14299/37844Diffractive elements designed to suppress unwanted zero order due to suface depth errortext::conference output::conference proceedings::conference paper