Combinatorial study of low-refractive Mg-F-Si-O nano-composites deposited by magnetron co-sputtering from compound targets

Mertin, SLanzlinger, TSandu, CSScartezzini, JLMuralt, P2018-11-082018-11-082018-11-08201810.1016/j.apsusc.2017.10.229https://infoscience.epfl.ch/handle/20.500.14299/149996WOS:000424247500022Combinatorial study of low-refractive Mg-F-Si-O nano-composites deposited by magnetron co-sputtering from compound targetstext::journal::journal article::research article