A 1.5-V Supplied, CMOS ASIC for the Actuation of an Electrostatic Micromotor

Favrat, P.Paratte, L.Ballan, H.Declercq, M. J.de Rooij, N. F.2009-05-122009-05-122009-05-12199710.1109/3516.622967https://infoscience.epfl.ch/handle/20.500.14299/39235A 1.5-V Supplied, CMOS ASIC for the Actuation of an Electrostatic Micromotortext::journal::journal article::research article