Calame, F.Muralt, P.2008-04-112008-04-112008-04-11200710.1007/s10832-007-9054-1https://infoscience.epfl.ch/handle/20.500.14299/20463WOS:00025179520002611739Novel 3D PZT thin film structure for micromechanicstext::journal::journal article::research article