Kapon, ElyahouIakovlev, VladimirSirbu, AlexeiRudra, Alok2015-09-222015-09-222015-09-222005https://infoscience.epfl.ch/handle/20.500.14299/118544A tunable Fabry-Perot vertical cavity photonic device and a method of its fabrication are presented. The device comprises top and bottom semiconductor DBR stacks and a tunable air-gap cavity therebetween. The air-gap cavity is formed within a recess in a spacer above the bottom DBR stack. The top DBR stack is carried by a supporting structure in a region thereof located above a central region of the recess, while a region of the supporting structure above the recess and outside the DBR stack presents a membrane deflectable by the application of a tuning voltage to the device contacts.patentJP4174322KR100622852KR100623406CN1263209DE60204007ES2241988DE60204007AT295011US6890778HK1069020EP1378039JP2004538621US6828168JP2004534383CN1524328CN1509406EP1378039EP1368623KR20030084994KR20030083735US2003169786US2003162315US6546029US6542531WO02075868AU2002234838WO02075263WO02075868US2002131464US20021314582520085027123202