Microelectromechanical Metal-Air-Insulator-Semiconductor (MEM-MAIS) Diode: A Novel Hybrid Device for ESD Protection

Acquaviva, D.Tsamados, D.Coronel, Ph.Skotnicki, T.Ionescu, A. M.2010-11-082010-11-082010-11-08200910.1109/MEMSYS.2009.4805336https://infoscience.epfl.ch/handle/20.500.14299/57210Microelectromechanical Metal-Air-Insulator-Semiconductor (MEM-MAIS) Diode: A Novel Hybrid Device for ESD Protectiontext::conference output::conference proceedings::conference paper