Kim, Myun-SikKeeler, EthanRydberg, SkylerNakagawa, WataruOsowiecki, Gaël DavidScharf, ToralfHerzig, Hans Peter2012-10-262012-10-262012-10-26201210.1109/OMEMS.2012.6318831https://infoscience.epfl.ch/handle/20.500.14299/86341WOS:000309942400055We investigate the reflow of non-circular, i.e., triangular and square, shaped pillars to fabricate nano-scale solid immersion lenses (SILs). Electron beam lithography (EBL) and thermal reflow are the core of the fabrication process. For the optical characterization at λ = 642 nm, nano-SILs are replicated on a transparent substrate by soft lithography. The focal spots produced by the nano-SILs show both spotsize reduction and peak-intensity enhancement, which are consistent with the immersion effect.solid immersion lenses (SILs)Electron beam lithography (EBL)text::conference output::conference proceedings::conference paper