Noell, W.Clerc, P.-A.Guldimann, B.Schürmann, G.Staufer, U.de Rooij, N. F.Herzig, H. P.Manzardo, O.Dändliker, R.Marxer, C.2009-04-222009-04-222009-04-22200210.1364/DOMO.2002.DTuC3https://infoscience.epfl.ch/handle/20.500.14299/37851Optical microelectromechanical systems (OMEMS) based on silicon-on-insulator (SOI) technologytext::conference output::conference proceedings::conference paper