Fabrication and Characterization of Cantilevers with Integrated Sharp Tips and Piezoelectric Elements for Actuation and Detection for Parallel AFM

Indermühle, P.-F.Schürmann, G.Racine, G.-A.de Rooij, N. F.2009-05-122009-05-122009-05-12199710.1016/S0924-4247(96)01440-9https://infoscience.epfl.ch/handle/20.500.14299/39429Fabrication and Characterization of Cantilevers with Integrated Sharp Tips and Piezoelectric Elements for Actuation and Detection for Parallel AFMtext::journal::journal article::research article