Bergander, A.Driesen, W.Lal, A.Varidel, T.Meizoso, M.Bleuler, H.Breguet, J. M.2005-10-132005-10-13200410.1109/IROS.2004.1389646https://infoscience.epfl.ch/handle/20.500.14299/217726A cluster of small cooperative robots capable of executing measurement and manipulation tasks is being developed within the scope of a European project. The robots are autonomous and have an overall dimension in the order of 1 cm/sup 3/. In this paper we present the concept of the robots, along with possible locomotion modules based on piezoelectric stick-slip actuators. Tools can be added to the robot for different measurements and manipulations. The integration of an AFM probe on the robot has been realized as a high resolution sensor for localization purposes and for measurements. First experimental results are shown.[HPR-MR]roboticsmicroengineeringmicro roboticsmobile micro robotAFM scannerpositioningpiezoelectric actuatorsstick-slip actuatorstext::conference output::conference proceedings::conference paper