Luque, AntonioBolea, R. G.Fernandez-Bolanos Badia, MontserratIonescu, Mihai AdrianQuero, J. M.2012-02-132012-02-13200610.1109/IECON.2006.348052https://infoscience.epfl.ch/handle/20.500.14299/77692Capacitive pressure microsensor fabricated by bulk micromachining and sacricial layer etchingtext::conference output::conference proceedings::conference paper