On-chip Mass Sensing at the Physical Limits of Nanoelectromechanical Systems

Kauth, ChristianPastre, MarcKayal, Maher2014-06-022014-06-022014-06-02201310.1109/IWASI.2013.6576089https://infoscience.epfl.ch/handle/20.500.14299/103848WOS:000333521100031A tunable and self-regulating on-chip carbon nanotube based mass balance is presented for small-size and low-cost environmental and healthcare applications. Tube stretching and a phase-locked loop topology make the system widely universal and invariant to nanotube characteristics. Operational for tube eigenfrequencies up to 385MHz, the circuit integration in a 180nm technology achieves instantaneous zeptogram resolution, while yoctogram precision is obtained within the tenth of a second. These figures of merit range at the physical limits of carbon nanotube resonators.On-chip Mass Sensing at the Physical Limits of Nanoelectromechanical Systemstext::conference output::conference proceedings::conference paper