Hof, L.A.Lal, AshwinFujisaki, KWüthrich, RolfLangen, HansBleuler, Hannes2006-06-062006-06-062006-06-062004https://infoscience.epfl.ch/handle/20.500.14299/230317SACEglass micro-machiningmicroengineeringrobotics[SACE]AFM3D Micro structuring of glass with an AFMtext::conference output::conference paper not in proceedings