Kiefer, ThomasSalette, ArnaudVillanueva, Luis GuillermoBrugger, Juergen2009-11-102009-11-10201010.1109/MEMSYS.2010.5442547https://infoscience.epfl.ch/handle/20.500.14299/44118WOS:000278416400033Very Large Scale Arrays of Chemo-Mechanical Nano-Switches for Ultralow Power Hydrogen Sensingtext::conference output::conference proceedings::conference paper