Micro-opto-mechanical systems: study of an array of torsional micro-mirrors in an opto-mechanical switch

Peter, Y.-A.Herzig, H. P.2009-04-222009-04-222009-04-221997https://infoscience.epfl.ch/handle/20.500.14299/37709Micro-opto-mechanical systems: study of an array of torsional micro-mirrors in an opto-mechanical switchtext::conference output::conference proceedings::conference paper