Grogg, D.Lo Conte, F.Kayal, M.Ionescu, A. M.2010-10-212010-10-212010-10-21200910.1109/FREQ.2009.51682352-s2.0-70449476507https://infoscience.epfl.ch/handle/20.500.14299/55907WOS:000274814900105A 9.4MHz micro-electromechanical oscillator based on a Vibrating Body Field Effect Transistor (VB-FET) is presented in this work. The tuning fork VB-FET used in this work provides a high quality factor of 9400 in the open-loop configuration and a low equivalent resistance. This performance makes the VB-FET an interesting candidate for fully integrated oscillator. An oscillator based on the tuning fork VB-FET is characterized.MEMSPhase noiseResonatorTransistorTunable oscillatorTuning forktext::conference output::conference proceedings::conference paper