Erickson, D.Rockwood, T.Emery, T.Scherer, A.Psaltis, D.2010-11-232010-11-232010-11-23200710.1117/12.7114902-s2.0-34248653479https://infoscience.epfl.ch/handle/20.500.14299/58143By integrating soft-lithography-based nanofluidics with silicon nanophotonics, we demonstrate dynamic, liquid-based addressing and high Δn/n (∼0.1) refractive index modulation of individual features within photonic structures at subwavelength length scales. We show ultracompact tunable spectral filtering through nanofluidic targeting of a single row of holes within a planar photonic crystal. We accomplished this with an optofluidic integration architecture comprising a nanophotonic layer, a nanofluidic delivery structure, and a microfluidic control engine. Variants of this technique could enable dynamic reconfiguration of photonic circuits, selective introduction of optical nonlinearities, or delivery of single molecules into resonant cavities for biodetection.text::conference output::conference proceedings::conference paper