Raible, S.Kappler, J.Briand, D.2009-05-122009-05-122009-05-12200410.1109/ICSENS.2004.1426275https://infoscience.epfl.ch/handle/20.500.14299/39707Wafer Level Packaging of Micro-Machined Gas Sensorstext::conference output::conference proceedings::conference paper