Hvozdara, LubosLogean, EricDi Francesco, JoabHerzig, Hans PeterVölkel, ReinhardEisner, MartinBaroni, Pierre-YvesRochat, MichelMuller, Antoine2013-01-312013-01-312013-01-312012https://infoscience.epfl.ch/handle/20.500.14299/88454A realization of a high numeric aperture, aspheric, silicon based collimating element for the mid-infrared (4 – 14 microns) Quantum Cascade Lasers, suited for mass production using computer driven reactive ion etching is presented.Infrared micro-opticsQuantum Cascade LasersReactive Ion EtchingMass productionSilicon based micro-optical collimating element for mid-infrared Quantum Cascade Laserstext::conference output::conference paper not in proceedings