Acquaviva, D.Arun, A.Esconjauregui, S.Bouvet, D.Robertson, J.Smajda, R.Magrez, A.Forro, L.Ionescu, A. M.2011-12-162011-12-162011-12-16201010.1063/1.3525165https://infoscience.epfl.ch/handle/20.500.14299/74881WOS:000285364000081We present the fabrication and high frequency characterization of a capacitive nanoelectromechanical system (NEMS) switch using a dense array of horizontally aligned single-wall carbon nanotubes (CNTs). The nanotubes are directly grown onto metal layers with prepatterned catalysts with horizontal alignment in the gas flow direction. Subsequent wetting-induced compaction by isopropanol increases the nanotube density by one order of magnitude. The actuation voltage of 6 V is low for a NEMS device, and corresponds to CNT arrays with an equivalent Young's modulus of 4.5-8.5 GPa, and resistivity of under 0.0077 Omega.cm. The high frequency characterization shows an isolation of -10 dB at 5 GHz. (C) 2010 American Institute of Physics. [doi:10.1063/1.3525165]NanorelayMemorytext::journal::journal article::research article