Gass, V.van der Schoot, B.Jeanneret, S.de Rooij, N. F.2009-05-122009-05-122009-05-12199410.1016/0924-4247(93)00703-7https://infoscience.epfl.ch/handle/20.500.14299/39276Integrated flow-regulated silicon micropumptext::journal::journal article::research article