Villanueva, GuillermoLarsen, TomMoreno, C. C.Vazquez-Mena, O.2018-01-172018-01-172018-01-172017https://infoscience.epfl.ch/handle/20.500.14299/144236Fabrication of silicon based micro-channels is typically a complex process involving multiple steps such as lithography, bonding, thin film deposition, etching, surface migration etc. We present a method for the fabrication of microchannels . insired by 2D material transferring techniques, we transfer a 100 nm thick silicon nitride film on top of a silicon nitride coated chip with predefined trenches and holes to form silicon nitride microchannels and membranes.MicrochannelsSilicon NitrideMicrofabricationtext::conference output::conference poster not in proceedings