Casamenti, EnricoTorun, GözdenBorasi, LucianoLautenbacher, MaximeBertrand, MathieuFaist, JérômeMortensen, AndreasBellouard, Yves2022-04-072022-04-072022-04-072022-04-0710.1364/OE.451026https://infoscience.epfl.ch/handle/20.500.14299/186920Chalcogenide glass exhibits a wide transmission window in the infrared range, a high refractive index, and nonlinear optical properties; however, due to its poor mechanical properties and low chemical and environmental stability, producing three-dimensional microstructures of chalcogenide glass remains a challenge. Here, we combine the fabrication of arbitrarily shaped three-dimensional cavities within fused silica molds by means of femtosecond laser-assisted chemical etching with the pressure-assisted infiltration of a chalcogenide glass into the resulting carved silica mold structures. This process enables the fabrication of 3D, geometrically complex, chalcogenide-silica micro-glass composites. The resulting products feature a high refractive index contrast that enables total-internal-reflection guiding and an optical quality roughness level suited for applications in the infrared.Fused silicaChalcogenideInfiltrationInfrared glasstext::journal::journal article::research article