Potential of dry etching for the fabrication of fused silica micro-optical elements

Nussbaum, Ph.Weible, K. J.Rossi, M.Herzig, H. P.2009-04-222009-04-222009-04-22199910.1117/12.360533https://infoscience.epfl.ch/handle/20.500.14299/37776Potential of dry etching for the fabrication of fused silica micro-optical elementstext::conference output::conference proceedings::conference paper