Micro-opto-mechanical 2 x 2 switch for single-mode fibers based on plasma-etched silicon mirror and electrostatic actuation

Marxer, C.de Rooij, N. F.2009-05-122009-05-122009-05-12199910.1109/50.737413https://infoscience.epfl.ch/handle/20.500.14299/39588Micro-opto-mechanical 2 x 2 switch for single-mode fibers based on plasma-etched silicon mirror and electrostatic actuationtext::journal::journal article::research article