Poliakine, J.Civet, Y.Perriard, Y.2014-12-102014-12-102014-12-10201410.1109/ICEMS.2014.7014094https://infoscience.epfl.ch/handle/20.500.14299/109313Modeling and characterization of a MEMS synchronous generatortext::conference output::conference proceedings::conference paper