Kippenberg, TobiasSchliesser, AlbertZhou, Xiaoqing2013-05-282013-05-28201310.5075/epfl-thesis-5761https://infoscience.epfl.ch/handle/20.500.14299/92466urn:nbn:ch:bel-epfl-thesis5761-5ensuperconducting circuitmicrowave cavitynanomechanicselectromechanicsNEMSelectromechanically induced transparencyDuffingnanofabricationthesis::doctoral thesis