Völkel, R.Herzig, H. P.Nussbaum, Ph.Singer, W.Dändliker, R.2009-04-222009-04-222009-04-22199610.1364/DOMO.1996.JMC.5https://infoscience.epfl.ch/handle/20.500.14299/37684Microlens lithographytext::conference output::conference proceedings::conference paper