Brugger, JürgenBoero, GiovanniHenriksson, Jonas Gustav2014-06-112014-06-11201410.5075/epfl-thesis-6144https://infoscience.epfl.ch/handle/20.500.14299/104182urn:nbn:ch:bel-epfl-thesis6144-2enbioprobemicromechanical cantileverarraysSU-8AFMmicroheaterFEMMEMScell force spectroscopythermal bimorph actuationsensornanomechanical resonatorhydrogenpalladiumNEMSultra-low powermicrofabricationsensor robustnessActuated MEMS and NEMS for cell force spectroscopy and gas sensing applicationsthesis::doctoral thesis