Hoffmann, P.Widmer, M.Lecohier, B.Solka, H.van den Bergh, H.2009-07-202009-07-202009-07-20199010.1117/12.23728https://infoscience.epfl.ch/handle/20.500.14299/41667[NRG]Fast in situ processing for multichip high density interconnectstext::conference output::conference proceedings::conference paper