Jutzi, FabioNoell, Wilfriedde Rooij, Nico2011-11-112011-11-112011-11-11201110.1109/OMEMS.2011.6031032https://infoscience.epfl.ch/handle/20.500.14299/72424WOS:000297850100064A novel technological platform is presented for the fabrication of vertical flaps and gratings of arbitrary shape. The flaps are suspended by torsion beams and actuated electrostatically at voltages as low as 10V. The main application is a high contrast reflective display.enreflective displayvertical flapsgratingselectrostatic micromirrrortrench refillingshutter arraytext::conference output::conference proceedings::conference paper