Zickar, M.Noell, W.Overstolz, T.Spörl, C.de Rooij, N. F.2009-05-122009-05-122009-05-122005https://infoscience.epfl.ch/handle/20.500.14299/40037Quasi-dry Release for Micro Electro-Mechanical Systemstext::conference output::conference proceedings::conference paper