Buser, R.A.Brugger, J.de Rooij, N.F.2005-11-022005-11-022005-11-02199110.1016/0167-9317(91)90252-9https://infoscience.epfl.ch/handle/20.500.14299/218585A monocrystalline silicon lever with an integrated silicon tip for a Force/Friction Microscope was realized. Theoretical studies have been carried out to find the shape and dimensioning according to the mechanical system requirements. Moreover, sharp tips with a high aspect ratio could be demonstrated.silicon cantileverAFMprobemicromachiningtext::journal::journal article::research article