Gariglio, S.Stucki, N.Triscone, J.-M.Isarakorn, D.Briand, D.de Rooij, N. F.Baek, S.-H.Reiner, J. W.Ahn, C. H.2009-05-122009-05-122009-05-122008https://infoscience.epfl.ch/handle/20.500.14299/39273MEMS Fabrication based on Epitaxial Piezoelectric Thin Films on Silicontext::conference output::conference proceedings::conference paper