Heinzelmann, H.Freyland, J. M.Eckert, R.Huser, Th.Schürmann, G.Noell, W.Staufer, U.de Rooij, N. F.2009-05-122009-05-122009-05-12199910.1046/j.1365-2818.1999.00567.xhttps://infoscience.epfl.ch/handle/20.500.14299/39385Several approaches are described with the aim of producing near-field optical probes with improved properties. Focused ion beam milling allows the fabrication of small apertures in a controlled fashion, resulting in probes with excellent polarization properties and increased transmission. Microfabrication processes are described that allow the production of apertures of 30-50 nm, facilitating the mass-fabrication of apertured tip structures that can be used in a combined force/near-field optical microscope. Finally, possible future developments are outlined.text::journal::journal article::research article