3D sequential integration: a key enabling technology for heterogeneous co-integration of new function with CMOS

Batude, P.Ernst, T.Arcamone, J.Coudrain, P.Gaillardon, Pierre-Emmanuel Julien Marc2012-05-072012-05-072012-05-072012https://infoscience.epfl.ch/handle/20.500.14299/801203D sequential integration: a key enabling technology for heterogeneous co-integration of new function with CMOStext::conference output::conference proceedings::conference paper