Pawlowski, A.-G.Sayah, A.Gijs, M.A.M.2005-10-262005-10-262005-10-26200510.1088/0960-1317/15/7/009https://infoscience.epfl.ch/handle/20.500.14299/218243WOS:000230714900010We have combined eroding 10 µm diameter Al2O3 particles with a new masking technology to realize the smallest and most accurate possible structures by powder blasting. Our masking technology is based on the sequential combination of two polymers:(i) the brittle epoxy resin SU8 for its photosensitivity and (ii) the elastic and thermocurable poly-dimethylsiloxane for its large erosion resistance. We have micropatterned various types of structures with a minimum width of 20 µm for test structures with an aspect ratio of 1, and 50 µm for test structures with an aspect ratio of 2.micro-powder blastingSU8PDMStext::journal::journal article::research article